Piezo Resistive Vacuum Sensors
HVG-2020B Vacuum Gauge
Optional Touch Screen Display, Wide Range, Flexible Vacuum Control!
The HVG-2020B wide range, dual sensor vacuum gauge takes measurement to the next level. With a Piezo based sensor and a thermal based Pirani sensor accurately and confidently measure pressures across seven decades. The Piezo sensor is media isolated, gas composition independent, and periodically zeroed by the Pirani sensor. An ambient thermal sensor enables the instrument to adjust for temperature and therefore better accuracy.
The optional touchscreen display, free windows data acquisition software and a variety of digital communication paths makes the HVG-2020B flexible and user friendly. Whether you need USB, RS 232, RS 485, linear or log outputs, graphical displays for data acquisition logging, this wide range gauge can perform.
Applications and Industries
- Semiconductor Etch
- Sputtering Chamber
- Load Lock Systems
- Process Control and Test
- Plasma Coating
|Range||0.1 mTorr – 1000 Torr |
|Accuracy*:||10 Torr – 1000 Torr|
1 mTorr – 10 Torr
0.2 mTorr – 1 mTorr
|+(0.1% of Reading +0.3 Torr)|
+(5% of Reading +0.25 mTorr)
+(10% of Reading +0.25 mTorr)
|Analog Output (Voltage):||0-1 VDC, 0-5 VDC, 0-10 VDC Linear & Log|
|Analog Output (Current):||0-20 mA, 4-20 mA|
|Input Voltage:||12-36 VDC|
|Wetted Materials:||304 and 316L Stainless Steel, Glass, Ni, Au|
|Process Control Setpoints||Dual TTL (High & Low)|
|*Includes non-linearity, hysteresis, repeatability at ambient operating temperature after 2 hours warm up followed by zero adjustment.|