Mass Flow - Analog

HFM-300 Mass Flow Meter

HFM-300 Mass Flow Meter

Model HFM-300 can measure flow ranges from 0-5 sccm up to 0-25 slm (N2 Equivalent); uses all metal seals, provide analog outputs, and are constructed of stainless steel. The controller (HFC-302) has a normally closed valve. Corrosive gases, with the exception of the halogens, pressures up to 1000 psig (optional) are easily measured.

The THI Mass Flow 300 Metaline Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±0.75% of full-scale for .005 to 10 slm and ±1.0% of full-scale for 10 to 25 slm. THI mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen), then a gas conversion factor (GCF) is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order.

These products contain a number of features that set them apart from other available instruments: (1) They are inherently linear; no linearization circuitry is employed. Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. (2) The output signal is linear for very large overflows and will not come back on scale when a flow an order of magnitude over the full scale flow rate is measured. (3) The HFM-300 incorporates a removable/replaceable sensor module. (4) The sensor tube is less likely to be clogged due to its large internal diameter (0.026″). (5) The low differential pressure drop across the flowmeter is ideal for leak detection applications. (6) The unit has very fast settling times and low thermal drift.


  • Accuracy:
    • ±0.75% of Full Scale for 5 sccm to 10 slm
    • ±1.0% of Full Scale for 10 to 25 slm
  • All-Metals Seals
  • 4 Ra Finish Available
  • Settling Time:
    • HFM-300 ≤ 0.50 sec
    • HFC-302 ≤ 0.75 sec
  • Available Flow Ranges:
  • 0-5 sccm up to 0-25 slm (N2 Equivalent)
  • Large Diameter Sensor Tube
  • Low Wetted Surface Area
  • Operating Pressures to 500 psi or higher
  • NIST Traceable Calibration


• Leak Testing
• Research
• Vapor Deposition
• R&D and Process Flows
• Semiconductor Processes
• Pollution Monitoring
• Gas Blending
• Chromatography